MethodsPublished 7 September 2026Robust SiON rib waveguides for CMOS-compatible surface plasmon resonance sensing of aqueous analytesMichal Hausner · Martin Feiler · Martin Ziman · Ľuboš Podlucký · Soňa Kováčová · Jaroslav KováčAdvanced Optical Technologiesdoi 10.3389/aot.2026.1936319
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