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Manufacturing Technology
Published 2 February 2023
Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe
Masakazu Aruga · So Ito · Daichi Kato · Kimihisa Matsumoto · Kazuhide Kamiya
Frontiers in Manufacturing Technology
doi 10.3389/fmtec.2023.1104742