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Methods
Published 7 September 2026
Robust SiON rib waveguides for CMOS-compatible surface plasmon resonance sensing of aqueous analytes
Michal Hausner · Martin Feiler · Martin Ziman · Ľuboš Podlucký · Soňa Kováčová · Jaroslav Kováč
Advanced Optical Technologies
doi 10.3389/aot.2026.1936319